Within this paper, the new lapping slurry and sharpening slurry are launched. As well as the deliquescence diploma of CLBO is fallen to most affordable. A whole new Operating technological know-how is usually adopted. Soon after rough sprucing, the concentration of extremely-precision sprucing slurry is amplified properly. So does the ultra-precision polishing speed, and the wiping speed is faster as opposed to deliquescence speed. The CLBO crystal surface roughness can reach 1nm and continue to keep the floor good quality effectively. Accessibility by means of your institution
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The common electrical power of the NIR laser still has the opportunity being improved to tens of watts which include 70 W [26] Should the double-pass configuration can be used for your Yb:YAG SCF amplifier phase. Consequently, In the event the conversion efficiency of 31% from NIR to DUV may very well be nevertheless managed at this bigger ability situation, the standard output energy on the DUV laser at 258 nm can be over 20 W, which might be a outstanding electricity level for the DUV laser and bring about the unanticipated DUV laser machining benefits. What's more, for high-energy DUV laser, the UV hurt with the nonlinear crystal, such as the Home windows for CLBO crystal and the mirrors, is another essential parameter for lasting and secure operation.
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On the opposite aspect, the ability scaling in the NIR laser is another element to enhance the typical electricity in the 193-nm DUV laser. A result of the insufficient the superior-electricity amplification solution with the NIR laser (as an example at 1553 nm), nonlinear frequency procedures like optical parameter oscillation (OPO) can be applied to make a wavelength converter by shifting the wavelength from one μm to the specified wavelength together with getting relative larger electrical power [21]. Just lately, a diamond Raman laser confirmed its ability in attaining a large electric power along with a substantial conversion performance at the 1st Stokes in the 1-μm laser [22,23], which suggests the chance to become applied from the 193-nm DUV laser era thanks to its significant Raman get and huge frequency shift.
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Also, combining the stable-condition laser with other nonlinear system which include stimulated Raman scattering, NIR lasers can be attained at new wavelengths with higher electric power and high beam top quality, which was examined through the proof-of-theory experiment. This Raman laser plan supplies a brand new route to the significant-ability DUV laser, Specially at the wavelength of 193 nm.
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The conversion effectiveness from fundamental NIR to DUV is from five% to 36% according to the claimed leads to Desk 1. Raising the conversion effectiveness will reduce the load on the look and set up of the basic laser amplifier in addition to the electric powered electrical power use. A great beam excellent of the fundamental laser will even add to the escalating with the conversion performance as well as the appropriate electricity depth with the NIR and environmentally friendly laser in the SHG and FHG process, respectively. The highest conversion efficiencies from NIR to green and green to DUV laser by use of CLBO crystal are 70% and around fifty%, respectively [twelve], which corresponds into the conversion efficiency of 35% from essential to DUV.
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